http://carbon-ir-heater.com/zh/tags/mems/ Recent content in MEMS on 先进 碳 红外线加热器 Hugo zh Tue, 28 Jul 2026 02:42:31 +0800 http://carbon-ir-heater.com/zh/posts/ensuring-safety-in-mems-wafer-drying-heaters-within-volatile-chemical-environments/ Tue, 28 Jul 2026 02:42:31 +0800 http://carbon-ir-heater.com/zh/posts/ensuring-safety-in-mems-wafer-drying-heaters-within-volatile-chemical-environments/ <p><img src="http://carbon-ir-heater.com/images/0a976f8a438e1a813cc995e9355a4471.png" alt="MEMS传感器晶圆干燥加热器"></p> <p>在用化学试剂清洗完MEMS传感器晶圆后，需要对其进行干燥处理，而这需要热量——而且必须尽快提供热量。不过，这里有个问题：如果周围存在易燃或易爆的蒸汽，那么普通的红外灯就不仅仅是一种工具而已，它还可能带来风险。</p>